Microfabrication

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Microfabrication or micromanufacturing are the terms to describe processes of fabrication of miniature structures, of micrometre sizes and smaller. Historically the earliest micromanufacturing was used for semiconductor devices in integrated circuit fabrication and these processes have been covered by the term "semiconductor device fabrication," "semiconductor manufacturing," etc. Practical advances in microelectromechanical systems (MEMS) and other nanotechnology, where the technologies from IC fabrication are being re-used, adapted or extended have led to the extension of the scope and techniques of microfabrication.^[1]

Miniaturization of various devices presents challenges in many areas of science and engineering: physics, chemistry, material science, computer science, ultra-precision engineering, fabrication processes, and equipment design. It is also giving rise to various kinds of interdisciplinary research.^[1]

The major concepts and principles of micromanufacturing are laser technology, microlithography, micromechatronics, micromachining and microfinishing (nanofinishing).

Contents 1 Fields of Use 2 Origins 3 Microfabrication processes 3.1 Substrates 3.2 Deposition or Growth 3.3 Patterning 3.4 Etching 3.5 Other 3.6 Micro cutting / microfabrication 4 Cleanliness in wafer fabrication 5 See also 6 References 6.1 Books about microfabrication 7 External links

[edit] Fields of Use

Microfabricated devices include:

• Fabrication of integrated circuits (“microchips”) (see semiconductor manufacturing)
• Microelectromechanical systems (MEMS), MOEMS, microfluidic devices (ink jet print heads)
• Laser diodes
• Flat Panel Displays (see AMLCD and Thin Film Transistor)
• Sensors (micro-sensors) (biosensors, nanosensors,)
• Nanotubes, fuel cells

[edit] Origins

Microfabrication technologies originate from the microelectronics industry, and the devices are usually made on silicon wafers even though glass, plastics and many other substrate are in use. Micromachining, semiconductor processing, microelectronic fabrication, semiconductor fabrication, MEMS fabrication and integrated circuit technology are terms used instead of microfabrication, but microfabrication is the broad general term.

Traditional machining techniques such as electro-discharge machining, spark erosion machining, and laser drilling have been scaled from the millimeter size range to micrometer range, but they do not share the main idea of microelectronics-originated microfabrication: replication and parallel fabrication of hundreds or millions of identical structures. This parallelism is present in various imprint, casting and molding techniques which have successfully been applied in the microregime. For example, injection moulding of compact discs involves fabrication of micrometer-sized spots on the disc.

[edit] Microfabrication processes

Microfabrication is actually a collection of technologies which are utilized in making microdevices. Some of them have very old origins, not connected to manufacturing, like lithography or etching. Polishing was borrowed from optics manufacturing, and many of the vacuum techniques come from 19th century physics research. Electroplating is also a 19th century technique adapted to produce micrometre scale structures, as are various stamping and embossing techniques.

To fabricate a microdevice, many processes must be performed, one after the other, many times repeatedly. These processes typically include depositing a film, patterning the film with the desired micro features, and removing (or etching) portions of the film. For example, in memory chip fabrication there are some 30 lithography steps, 10 oxidation steps, 20 etching steps, 10 doping steps, and many others are performed. The complexity of microfabrication processes can be described by their mask count. This is the number of different pattern layers that constitute the final device. Modern microprocessors are made with 30 masks while a few masks suffice for a microfluidic device or a laser diode. Microfabrication resembles multiple exposure photography, with many patterns aligned to each other to create the final structure.

[edit] Substrates

Microfabricated devices are not generally freestanding devices but are usually formed over or in a thicker support substrate. For electronic applications, semiconducting substrates such as silicon wafers can be used. For optical devices or flat panel displays, transparent substrates such as glass or quartz are common. The substrate enables easy handling of the micro device through the many fabrication steps. Often many individual devices are made together on one substrate and then singulated into separated devices toward the end of fabrication.

[edit] Deposition or Growth

Microfabricated devices are typically constructed using one or more thin films (see Thin film deposition). The purpose of these thin films depends on the type of device. Electronic devices may have thin films which are conductors (metals), insulators (dielectrics) or semiconductors. Optical devices may have films which are reflective, transparent, light guiding or scattering. Films may also have a chemical or mechanical purpose as wells for MEMS applications. Examples of deposition techniques include:

• Thermal oxidation
• sputtering
• evaporative deposition,
• chemical vapor deposition (CVD)
• epitaxy

[edit] Patterning

It is often desirable to pattern a film into distinct features or to form openings (or vias) in some of the layers. These features are on the micrometer or nanometer scale and it is the patterning technology is what defines microfabrication. The patterning techinique typically uses a 'mask' to define portions of the film which will be removed. Examples of patterning techniques include:

• Photolithography
• Shadow Masking

[edit] Etching

Main article: Etching (microfabrication)

Etching is the removal of some portion of the thin film or substrate. The substrate is exposed to an etching (such as an acid or plasma) which chemically or physically attacks the film until it is removed. Etching techniqes include:

• Dry etching (Plasma etching) such as Reactive-ion etching (RIE) or Deep reactive-ion etching(DRIE)
• Wet etching or Chemical Etching

[edit] Other

A wide variety of other processes for cleaning, planarizing, or modifying the chemical properties of the microfabricated devices can also be performed. Some examples include:

• Doping by either thermal diffusion or ion implantation
• Chemical-mechanical planarization (CMP)
• Wafer cleaning, also known as "surface preparation" (see below)
• Wire bonding

[edit] Micro cutting / microfabrication

Microfabrication is the downscalling of macro processes such as cutting, forming, etc... the most productivity techniques and 3D shapes are available by micro milling with flat end mill under 100 µm diameter using cutting tool for material removal is cheaper and fastest The competitivity pôle of Besançon (France) is one of the leadership of microtechniques and can propose formations about this (lpmicrofab.free.fr)

[edit] Cleanliness in wafer fabrication

Microfabrication is carried out in cleanrooms, where air has been filtered of particle contamination and temperature, humidity, vibrations and electrical disturbances are under stringent control. Smoke, dust, bacteria and cells are micrometers in size, and their presence will destroy the functionality of a microfabricated device.

Cleanrooms provide passive cleanliness but the wafers are also actively cleaned before every critical step. RCA-1 clean in ammonia-peroxide solution removes organic contamination and particles; RCA-2 cleaning in hydrogen chloride-peroxide mixture removes metallic impurities. Sulfuric acid-peroxide mixture (a.k.a. Piranha) removes organics. Hydrogen fluoride removes native oxide from silicon surface. These are all wet cleaning steps in solutions. Dry cleaning methods include oxygen and argon plasma treatments to remove unwanted surface layers, or hydrogen bake at elevated temperature to remove native oxide before epitaxy. Pre-gate cleaning is the most critical cleaning step in CMOS fabrication: it ensures that the ca. 2 nm thick oxide of a MOS transistor can be grown in an orderly fashion. Oxidation, and all high temperature steps are very sensitive to contamination, and cleaning steps must precede high temperature steps.

Surface preparation is just a different viewpoint, all the steps are the same as described above: it is about leaving the wafer surface in a controlled and well known state before you start processing. Wafers are contaminated by previous process steps (e.g. metals bombarded from chamber walls by energetic ions during ion implantation), or they may have gathered polymers from wafer boxes, and this might be different depending on wait time.

Wafer cleaning and surface preparation work a little bit like the machines in a bowling alley: first they remove all unwanted bits and pieces, and then they reconstruct the desired pattern so that the game can go on.

[edit] See also

• Semiconductor fabrication
• Integrated circuit
• Microelectronics
• Sensors
• Actuators
• Transducers
• Microfluidics
• 3D microfabrication

[edit] References

1. ^ ^{a b} Nitaigour Premchand Mahalik (2006) "Micromanufacturing and Nanotechnology", Springer, ISBN 3540253777

• Journal of Microelectromechanical Systems (J.MEMS)
• Sensors and Actuators A: Physical
• Sensors and Actuators B: Chemical
• Journal of Micromechanics and Microengineering
• Lab on a Chip
• IEEE Transactions of Electron Devices,
• Journal of Vacuum Science and Technology A: Vacuum, Surfaces, Films
• Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena

[edit] Books about microfabrication

• (2004)Geschke, Klank & Telleman, eds.: Microsystem Engineering of Lab-on-a-chip Devices, 1st ed, John Wiley & Sons. ISBN 3-527-30733-8.
• Introduction to Microfabrication (2004) by S. Franssila. ISBN 0470851066
• Fundamentals of Microfabrication (2nd ed, 2002) by M. Madou. ISBN 0849308267
• Micromachined Transducers Sourcebook by Gregory Kovacs (1998)
• Brodie & Murray: The Physics of Microfabrication (1982),
• D. Widmann, H. Mader, H. Friedrich: Tehnology of Integrated Circuits (2000),
• J. Plummer, M.Deal, P.Griffin: Silicon VLSI Technology (2000),
• G.S. May & S.S. Sze: Fundamentals of Semiconductor Processing (2003),
• P. van Zant: Microchip Fabrication (2000, 5th ed),
• R.C. Jaeger: Introduction to Microelectronic Fabrication (2001, 2nd ed),
• S. Wolf & R.N. Tauber: Silicon Processing for the VLSI Era, Vol 1: Process technology (1999, 2nd ed),
• S.A. Campbell: The Science and Engineering of Microelectronic Fabrication (2001, 2nd ed)
• T. Hattori: Ultraclean Surface Processing of Silicon Wafers : Secrets of VLSI Manufacturing

[edit] External links

• Microfabrication Processes Microfabrication Processes