From Wikipedia, the free encyclopedia
Phosphosilicate glass, commonly referred to by the acronym PSG, is a silicate glass commonly used in semiconductor device fabrication for intermetal layers, i.e., insulating layers deposited between succeedingly higher metal or conducting layers. Another common species of phosphosilicate glass is BPSG or borophosphosilicate glass.
Soda-lime phosphosilicate glasses also form the basis for bioactive glasses (e.g. Bioglass), a family of materials which chemically convert to mineralised bone (hydroxy-carbonate-apatite) in physiological fluid.
